Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes
نویسندگان
چکیده
منابع مشابه
Metal Ion Implanted Compliant Electrodes in Dielectric Electroactive Polymer (EAP) Membranes
One of the key factors to obtain large displacements and high efficiency with dielectric electroactive polymer (DEAPs) actuators is to have compliant electrodes. Attempts to scale DEAPs down to the mm or micrometer range have encountered major difficulties, mostly due to the challenge of micropatterning sufficiently compliant electrodes. Simply evaporating or sputtering thin metallic films on e...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2006
ISSN: 0924-4247
DOI: 10.1016/j.sna.2005.11.069